클로로실란

클로로실란(모노클로로실란, SiH₃Cl, CAS 13465-78-6)은 자극적이고 자극적인 냄새가 나는 무색의 자연발화성 가스입니다. -30.4도에서 끓고 공기와 접촉하면 자연 발화(자동 발화)<20 °C), it is one of the most reactive members of the chlorosilane family. Freely soluble in carbon tetrachloride, carbon disulfide, ether, and THF, it hydrolyzes violently with moisture to release hydrogen chloride and flammable hydrogen gas. As a critical silicon-source precursor in CVD processes, chlorosilane is widely used for epitaxial silicon wafer growth, polysilicon thin-film deposition, SiC film fabrication for power devices, and the synthesis of organosilicon monomers (silicone oils, rubbers, resins, coupling agents). Classified as water-reactive, pyrophoric, and highly toxic (UN 2986, Class 4.3+2.3, PG I); handle only in sealed cylinders under dry inert atmosphere, strictly isolated from air, moisture, and combustibles.